- Characteristics:
- Secondary electrons imaging analysis (SEI) with resolution of up to 4.0 nm (at 25kV
in high vacuum), magnification range of 15x…300,000x, acceleration voltage of
0.5kV…30kV; - Backscattered electrons imaging analysis (BSE) with resolution of up to 5.0 nm (at
25kV in variable pressure), pressure range of 1…270 Pa, magnification range of
15x…300,000x; - Qualitative and quantitative microanalysis by energy dispersive X-ray spectrometry
(EDS).
- Secondary electrons imaging analysis (SEI) with resolution of up to 4.0 nm (at 25kV